The electrostatic chuck (ESC) is used in many key semiconductor processes to hold the wafer, it uses a static electric filed to clamp the wafer under vacuum conditions.

Almost all ESC’s (ceramic and polyamide) can by means of rework to regain the original specifications, semiXicon/Werlchem has developed an extensive amount of experience in refurbishing ESC’s ,our reconditioning services will provide a significant cost saving opportunity at even a shorter lead time than original makers.