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Products / Services
- Electrostatic Chuck (ESC)
  Refurbishment
- Aluminum Nitride Heater
- Porous Ceramic Vacuum Chuck
- Aluminum Nitride Substrate
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  Email:Sales@semixicon.com  
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  Aluminum Nitride Substrate

Aluminum Nitride ceramic substrate has a thermal conductivity more than 170 W/m-K and high electrical resistivity, the new material is gaining more and more application in semiconductor and electronic industries.

For other tailor made dimensions, please contact us for quote with cost and lead time.

 





 
         
 

Item

Unit

Type

AN-170

AN-200

Dimension

inch

2x2/4x4/6x6/8x8,12"×12" (max)

6"×6" (max)

Thickness

mm

0.385/0.635/1.0/1.2 

0.385≦ t ≦1.5

10.0 (max)

 Through hole

mm

≧φ0.1

≧φ0.1

Density

g/cm3

3.3-3.35

3.33-3.36

Thermal Conductivity

W/(m.k))

170-190

>200